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Wafer Processing Services
 

SI-TECH, INC. provides a variety of silicon services.

The majority of these services are listed below.

Typical uniformity is less than or equal to five (5) per cent unless otherwise noted.

Please see our Products page for additional offerings

 

WAFER PROCESSING SERVICES

Prices effective January 16, 2020

 

OXIDE

                

PROCESS

  

THICKNESS 

4"/100mm 

5"/125mm 

6"/150mm 

8"/200mm 

12"/300mm 

  
                 

THERMAL OXIDE

   <= 10 KA $9.00 $9.25 $  11.50 $  14.25 $  21.25
    10KA-20KA $14.00 $  14.25 $  14.75 $  17.50 $  30.25
    20KA-30KA

$ 18.50

 $  25.00 $  26.25 $  38.75  N/A 
    30KA-40KA $  25.25 $  36.50 $  37.75 $  48.00  N/A 
    40KA-50KA $  32.50 $  52.75 $  54.00 $  65.25  N/A 
    50KA-60KA

$ 44.00

 $  70.25 $  71.50 $  82.00  N/A 
                 

PECVD OXIDE

   < = 5 KA $22.50 $  25.00 $  28.75 $  41.00 $  95.00
    5 - 10 KA $  28.75 $  34.25 $  35.00 $  47.25 $  107.00
    10 - 15 KA $  35.00 $  37.50 $  41.00 $  53.50 $  120.00
    15 - 20 KA $  41.00 $  43.75 $  47.00 $  60.00 $  126.00
                 

ANNEALING

  

 

 $14.00

 $16.00

 $16.00

 $18.00

 N/A

 
                 

NITRIDE

                

PROCESS

  

THICKNESS

4"/100mm

5"/125mm

6"/150mm

8"/200mm

12"/300mm

  
 

LPCVD  NITRIDE

   < 3 KA $  19.00 $  20.00 $  21.00 $  26.00 $  68.75  
    3000-4500 A $  22.25 $  25.00 $  25.00 $  40.00  N/A   

Furnace temperature = 820 C

  
   

   

            

LOW STRESS NITRIDE

   < = 5 KA $45.00 $48.00 $48.00 $61.00 N/A
    5 - 10 KA $60.00 $63.00 $63.00 $76.00 N/A
    10 - 15 KA $75.00 $78.00 $78.00 $91.00 N/A
    15 - 20 KA$90.00$93.00$93.00$106.00N/A

Furnace temperature = 820 C

  
                 

PECVD NITRIDE

  

< = 5 KA

 $  25.00 $  27.50 $  32.50 $  45.00 $  97.50  

Furnace temperature = 300-400 C

            
                 

LOW STRESS NITRIDE

  

< = 5 KA

 $  32.50 $  35.00 $  38.75 $  51.25 $  106.00  
   

5 -10 KA

 $  38.75 $  41.25 $  45.00 $  57.50 $  118.00  
   

10 - 20 KA

 $  45.00 $  47.50 $  51.25 $  63.75 $  131.00  

Furnace temperature = 300-400 C

            

PECVD OXYNITRIDE

  

< = 5 KA

 $  32.50 $  35.00 $  38.75 $  51.25 $  106.00  
   

5 -10 KA

 $  38.75 $  41.25 $  45.00 $  57.50 $  118.00  
   

10 - 20 KA

 $  45.00 $  47.50 $  51.25 $  63.75 $  131.00  

Furnace temperature = 300-400 C

            
                 

POLY SI DEPOSITION*

  

1-5 KA

 $15.00 $15.75 $16.50 $20.00 $58.00  
   

5 -10 KA

 $18.00 $19.00 $20.00 $29.00 $75.00  
   

10 - 20 KA

 $24.00 $25.25 $26.50 $34.00 N/A  

Furnace temperature = 610 C

            

PHOTOLITHOGRAPHY

  

PROCESS

  

THICKNESS

4"/100mm

5"/125mm

6"/150mm

8"/200mm

12"/300mm

  

BLANKET PHOTORESIST
Prebake HDMS Prime

1-3µm I-line

 $  8.00 N/A $  12.00 $  14.00 $  20.00  
Prebake HDMS Prime

3.2-5µm I-line

 $  12.00 N/A $  14.00 $  16.00 $  24.00  
Prebake HDMS Prime

5.2-10µm I-line

 N/A N/A N/A $  22.00 $  30.00  
 
Prebake HDMS Prime

1-3µm 248nm

 N/A N/A $  16.00 $  18.00 $  26.00  
 
Prebake HDMS Prime

.25-.4µm 193nm

 N/A N/A N/A $  24.00 $  30.00  
 
PHOTOLITHOGRAPHY                
.8µm Stepped Masking  N/A   N/A   N/A  $  59.00 $  72.00  
Proximity Masking $  19.00  N/A  $  27.00 $  35.00 $  58.00  
Checker Board Masking  N/A   N/A  $  20.00 $  25.25 $  39.00  
                 

SPUTTERING/DEPOSITION

  

PROCESS

  

THICKNESS

4"/100mm

5"/125mm

6"/150mm

8"/200mm

12"/300mm

  
 

PVD

                

Pure Aluminum (Al)

  

250-10 KA

 $   20.00 $  21.00 $  22.00 $  27.50 $   70.00  

Al/Copper (Al/Cu 0.5%)

  

250-10 KA

 $   20.00 $  21.00 $  22.00 $  27.50 $   70.00  

Al/Copper (Al/Cu 2.0%)

  

250-10 KA

 $   20.00 $  21.00 $  22.00 $  27.50 $   70.00  

Titanium (Ti)

  

200-3000 A

 $   21.00 $  22.00 $  23.00 $  30.00 $   80.00  

Titanium Nitride (TiN)

  

200-3000 A

 $   24.00 $  25.25 $  26.50 $  35.00 $   83.00  

Tungsten (W)

  

200-3000 A

 $   30.00 $  31.50 $  32.50 $  38.00 $   87.00  

Tantalum (Ta)

  

200-3000 A

 $   22.00 $  23.00 $  24.00 $  30.00 $   80.00  

Tantalum Nitride (TaN)

  

200-3000 A

 $   24.00 $  25.50 $  26.50 $  35.00 $   83.00  

Copper (Cu)

  

200-15 KA

 $   22.00 $  23.00 $  24.00 $  30.00 $   80.00  

Cromium (Cr)

  

200-2000 A

 $   32.00 $  33.55 $  35.00 $  40.00 $   87.00  
                 

SPUTTER DEPOSITION

                

Pure Aluminum (Al)

  

250-10 KA

 $   15.00 $  23.75 $  24.75 $  41.00 $   92.00  

Al/Copper (Al/Cu 0.5%)

  

250-10 KA

 $   15.00 $  23.75 $  24.75 $  41.00 $   92.00  

Copper (Cu)

  

250-10 KA

 $   16.00 $  27.50 $  28.50 $  42.00 $   93.50  

Titanium (Ti)

  

250-3000 A

 $   16.00 $  26.25 $  27.25 $  41.00 $   92.00  

Tantalum (Ta)

  

250-3000 A

 $   16.00 $  26.25 $  27.25 $  41.00 $   92.00  

Cromium (Cr)

  

250-3000 A

 $   19.00 $  31.25 $  32.25 $  46.00 $   98.00  

Tungsten (W)

  

250-3000 A

 $   19.00 $  31.25 $  32.25 $  46.00 $   98.00  

Titanium Nitride (TiN)

  

250-3000 A

 $   18.00 $  28.75 $  29.75 $  43.75 $   96.00  

Tantalum Nitride (TaN)

  

250-3000 A

 $   18.00 $  28.75 $  29.75 $  43.75 $   96.00  
                 

EVAPORATED METALS#

                

Aluminum (Al)

  

50- 5 KA

 $  850.00  N/A  $  875.00 $  925.00  N/A   

Copper (Cu)

  

50- 5 KA

 $  850.00  N/A  $  875.00 $  925.00  N/A   

Cromium (Cr)

  

50 - 3 KA

 $  900.00  N/A  $  925.00 $  975.00  N/A   

Tin (Sn)

  

50 - 3 KA

 $  900.00  N/A  $  925.00 $  975.00  N/A   

Titanium (Ti)

  

50 - 3 KA

 $  900.00  N/A  $  925.00 $  975.00  N/A   

Gold (Au)

  

50 - 3 KA

 Call for pricing  Call for pricing  Call for pricing  Call for pricing  Call for pricing   

Platinum (Pt)

  

50 - 3 KA

 Call for pricing  Call for pricing  Call for pricing  Call for pricing  Call for pricing   

# E-Beam Evaporation process. Prices are lot charges per batch of wafers. Call for more details.

  
                 
CVD GRAPHENE ON SILICON     Call for pricing Call for pricing Call for pricing Call for pricing Call for pricing  
                 

SILICON GERMANIUM

  

 

N/A

N/A

N/A

N/A

Call for pricing

  
                 

PECVD OXYNITRIDE

  

< = 5 KA

$32.50

$35.00

$38.75

$51.25

$106.00

 
   

5 -10 KA

$38.75

$41.25

$45.00

$57.50

$118.00

 
   

10 - 20 KA

$45.00

$47.50

$51.25

$63.75

$131.00

 

Furnace temperature = 300-400 C
                 

POLY SI DEPOSITION

  

1 - 5 KA

 $   15.00 $  19.25 $  20.25 $  23.00 $   59.75  

 

  

5 - 10 KA

 $   18.00 $  23.00 $  24.00 $  29.00 $   69.00  

 

  

10 - 20 KA

 $   22.25 $  29.00 $  30.00 $  34.00  N/A   
Process temperature = 610 C
                 
AMORPHOUS SILICON*                
    200-500 A $   22.50 $  33.00 $  34.00 $  39.00 $   13.55  
    500- 1.5KA $   22.75 $  33.50 $  34.50 $  39.00 $   38.75  
* ALL DEPOSITED LPCVD THIN FILMS HAVE A 6mm EDGE EXCLUSION
                 

WAFER POLISHING AND RECLAIM

  
                 

PROCESS

  

THICKNESS

4"/100mm

5"/125mm

6"/150mm

8"/200mm

12"/300mm

  

WAFER POLISHING CLEAN

                
Silicon    

Call for pricing

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Galium Arsenide    

Call for pricing

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Germanium    

Call for pricing

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Call for pricing

 

 

  

 

            

WAFER POLISHING FULL

    

Call for pricing

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Call for pricing

 
                 
DIFFUSION CLEAN     $   7.25 $  8.00 $  8.50 $  14.00 $   19.50  
                 

STRIP THERMAL/CVD OXIDE*

     $   8.00 $  8.25 $  8.50 $  12.00 $   16.00  
                 

STRIP POLYSILICON/NITRIDE*

     $   10.00 $  13.00 $  14.00 $  17.00 $   31.00  
                 

PHOTORESIST STRIP*

     $  12.00 $  12.25 $  12.50 $  16.00 $   16.00  

*Minimum 100 wafers

                
                 

PLASMA ASH REMOVAL

     $  12.00 $  12.25 $  12.50 $  16.00 $   16.00  
                 

MISC. SERVICES

  
LASER MARK     Call for pricing Call for pricing Call for pricing Call for pricing Call for pricing  
                 

WAFER RECLAIM

  

 

Call for pricing

Call for pricing

Call for pricing

Call for pricing

Call for pricing

 
                 

EPI WAFERS

   EPI PRICES ARE QUOTED AS PER CUSTOMER SPECIFICATIONS 
                 

SILICON GERMANIUM

  

 

N/A

N/A

N/A

N/A

Call for pricing 

  
                 

WET PATTERN O2 ETCH

  

7:1 BOE

 $14.00 $14.50 $15.00 $20.00 $29.00  
                 

25 wafer minimum each process

        
                 

5 PERCENT DISCOUNT FOR PURCHASES OF 200 TO 500 WAFERS.

  
                 

10 PERCENT DISCOUNT FOR PURCHASES  OF GREATER THAN 500 WAFERS.

  
                 

Prices subject to change without notice

  
                 
                 
 
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